Reduce the method of accelerating the total gas load of the equipment vacuum system

Reduce the total system gas load (1) Clean the inner surface of the front cable harness. The front beam line pipe is removed piece by piece and sent to the special factory for electrochemical cleaning and polishing. After electrochemical treatment, the parts are put into 2%-5% ammonia water to neutralize for 1520 seconds, then washed with water, anhydrous ethanol is dehydrated, drying. The surface of the component that should not be disassembled has also been thoroughly scrubbed. Specific methods: first wipe with carbon tetrachloride, and then rub with acetone, then wipe with anhydrous ethanol, dehydration, after installation with a tungsten halogen lamp for baking. After the cleaning process, the total airborne load of the system can be reduced by at least 1/2, that is, 2.6@10-3Pa#L#s-1 (which includes the leakage part). (2) Grinding and reworking the sealing surface. All sealing flanges must undergo a rigorous inspection. All surfaces with low surface finish must be ground. Anything that needs rework must be processed in time to meet the sealing requirements. All sealed rubber strips were replaced with fluoroelastomers with a low outgassing rate. Replace the seal. Replace the two flat flanges with a rubber plate sealed /O0-ring seal and add a bracing ring in the middle. Metal seals can be sealed with metal. Check all vacuum gauges and valves, repair sealing surfaces, remove contaminants. (3) Comprehensive and systematic leak detection. From the mass spectrometry analysis in Figure 3, it can be seen that the system is leaky. This needs to increase the effective sensitivity of the leak detector in the work, and it must be strictly monitored during the installation and debugging of the front beam line transformation to conduct a comprehensive and systematic leak detection; during the operation and use, the possible leakage of the vacuum system will be monitored. Pipeline leaks are the most serious and are the focus of leak detection. (4) vacuum baking. After the system is reinstalled, take baking measures. Considering the temperature to which the fluororubber seal can withstand, it can be baked with a heating tape to about 100e.

After the transformation of the front beamline vacuum system, the reform of the front beamline vacuum system was implemented from June 20, 2001 to September 10, 2001. The indexes after the renovation are as follows (measured on November 26, 2001): (1) Total gas load. The gas load measurement of the vacuum system before the transformation was 6.1@10-3Pa#L#s-1 before modification and 2.0@10-3Pa#L#s-1 after modification. The modified gas load value. (2) Outgassing rate. Before the transformation, the outgassing rate of the vacuum system on the front beam line was 1.1@10-8 Pa#L#s-1 cm<2>, and after the transformation, it reached 3.7@10-9 Pa#L#s-1 cm<2> .

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