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The "large-diameter lithography" project undertaken by Xiguang Institute of Chinese Academy of Sciences passed the acceptance test.
[ China Instrument Network Instrument Development ] Recently, the "large-diameter lithography" project undertaken by the Xi'an Institute of Optics and Fine Mechanics of the Chinese Academy of Sciences passed the acceptance test, which marked a breakthrough in the development of China's large-diameter lithography instrument.
In the aerodynamic study, the large-diameter lithography instrument has the characteristics of high sensitivity and ability to display the gas continuously changing density field, and is one of the core optical devices of a large-scale engineering construction project in the country. The large-diameter schlieren is a precision optical instrument. The relatively small-diameter lithography instrument has an unprecedented harsh working environment, which poses a major technical challenge to the system's large-diameter precision optics and large-scale precision structures. Xi'an Opto-mechanical Institute and the application unit work closely together to carry out key technical researches in three aspects: optics, structure and electronics. They have mastered the key technologies of large-diameter schlieren optical imaging systems under harsh working conditions, and successfully developed the largest caliber in China. The schlieren.
In the trial operation of the past two years, the environmental test indicators were successfully passed, and the various imaging performance indicators of the instrument performed well, and passed the project acceptance, which contributed to the construction of a large-scale project in the country.
At present, China has become a major producer of optical instruments in the world. More than half of the world's low-end optical products are produced in China. However, compared with developed countries, there are still significant gaps in the research and industrialization of high-end optical instruments such as super-resolution optical microscopes and nano-scale optical detection instruments.
Therefore, national and local government departments have paid great attention to the development of precision optical instruments and systems, and invested a lot of manpower, material resources and financial resources.
(Original title: "The large-diameter schlieren" project passed the acceptance test)